Research on preparation, micro-patterning and performance measurement methods of MEMS functional film materials

1. A method and a technique for preparing a medium-thick intelligent material having a high electromechanical conversion coefficient and a high power density; a method and a technique for preparing a smart film on a non-planar surface such as a cylinder surface;
2. High-precision micro-patterning technology of smart film in micro-system, focusing on wet etching method and technology with high graphic precision and process controllability;
3. Methods, techniques and instruments for comprehensive testing of MEMS piezoelectric film properties. Developed a piezoelectric piezoelectricity detecting device for thin film piezoelectric bodies, and automatically measured parameters such as dielectric constant, residual polarization, coercive field strength and piezoelectric strain constant;
4. Research on PZT control method to reduce hysteresis. At present, it is mainly from the perspective of reducing the control voltage range and voltage and charge mixing control.

Three-dimensional processing technology of MEMS structural materials

1. Process and device for manufacturing three-dimensional three-dimensional parts of micro-system by laser scanning light forming technology; laser two-photon full three-dimensional three-dimensional micro-nano structure processing device, method and technology;
2. Research on scanning plasma processing technology for MEMS manufacturing. Improve tool life through real-time active control of the tool-sample spacing, and achieve practical machining efficiency through parallel operation of the array.

Research on Microsystem Parts Control and Assembly Technology

1. Study the mechanism and method of handling small objects, and study the high-precision remote automatic manipulation and assembly technology of small parts;
2. Study new combinations of surface activation and room temperature and apply them to microsystem assembly.

Application of intelligent microsystem technology

1. Scanning probe ultra-high-density information storage technology, using MEMS technology to study independent and actively controlled scanning micro-probe arrays to solve the problem of low access rate and short tip life in scanning probe information storage;
2. Piezoelectric micro-sensors and actuators for scanning force microscopes use intelligent piezoelectric micro-probes to replace optical detection and scanning systems in traditional scanning force microscopes, further expanding the application range of SFM;
3. Piezoelectric MEMS deformable mirror technology applied to spaceborne adaptive optics and active optics.

Scanning probe microscopy

1. Nano surface measurement and analysis evaluation based on atomic force microscopy;
2, atomic force microscope liquid environment working mechanism and application research, combined with ultrasound atomic force microscope imaging basic analysis and research.

Femtosecond laser processing technology research

1. Femtosecond laser efficient high resolution cross-scale processing method;
2. The interaction of the femtosecond laser with the material;
3. Processing of specific functional devices.